The method for measuring the profile error is the profiling method, the cross-sectional contour method, the optical tracking method and the coordinate method. The first three methods not only require the production of a high-precision contour template or an ideal contour of a plurality of measuring sections, but also the manufacturing precision of the contour of the template and the accuracy of the measurement of the ideal contour of the measuring section affect the measurement accuracy. The cross-sectional profile method and the optical tracking method all use the measurement line profile error to estimate the surface profile error.
Coordinate measurement method and evaluation of surface profile error